| Product Name: Halocarbon 41 – Fluoromethane CH3F |
| Packing: 40L, 47L, 50L cylinder (GB, ISO, DOT) |
| Filling Content: 40kg/cyl |
| Items |
Specifications |
| CH3F |
99.5% |
99.995% |
| O2 |
≤20 ppbv |
≤5 ppmv |
| N2 |
≤70 ppbv |
≤20 ppmv |
| CO2 |
|
≤10 ppmv |
| CO |
|
≤10 ppmv |
| CH4 |
|
≤5 ppmv |
| H2O |
≤10 ppbv |
≤2 ppmv |
|
| Transportation |
| DOT Shipping Name |
Fluoromethane |
| DOT Classification |
2.1 |
| DOT Label |
Inflammable Gas |
| UN Number |
UN2810 |
| CAS No. |
593-53-3 |
| CGA/DISS/JIS |
350/724/W22-14L |
| Shipped as |
Liquefield Gas |
|
| Technical Information |
| Cylinder State @ 21.1°C |
Liquid |
| Flammable Limits In Air |
Non-flammable |
| Auto Ignition Temperature (°C ) |
-18 |
| Molecular Weight (g/mol) |
34.03 |
| Specific gravity (air =1) |
1.18 |
| Critical Temperature ( °C ) |
45 |
|
| Applications |
| In semiconductor manufacturing, fluoromethane is a plasma etching gas of silicon compound films. |
