| Product Name: Silane SiH4 |
| Packing: 40L, 47L, 50L cylinder, Y cylinder (GB, ISO, DOT) |
| Filling Content: 12kg/cyl， 125kg/cyl |
| Items |
Specifications |
| SiH4 |
99.9999% |
| O2+ Ar |
≤0.06 ppmv |
| N2 |
≤0.5 ppmv |
| CO2 |
≤0.05 ppmv |
| H2 |
≤20.0 ppmv |
| CO |
≤0.08 ppmv |
| H2O |
≤0.5 ppmv |
| CH4 |
≤0.04 ppmv |
| He |
≤1.0ppmv |
| THC(Sum of C2-C4) |
≤0.1 ppmv |
| Total Chlorosilanes |
≤0.1 ppmv |
| Disilane |
≤0.5 ppmv |
| Disiloxane |
≤0.05 ppmv |
| Resistivity, N-type ( ohm-cm) |
>2500 |
|
| Transportation |
| DOT Shipping Name |
Silane |
| DOT Classification |
2.1 |
| DOT Label |
Flammable gas |
| UN Number |
UN 2203 |
| CAS No. |
7803-62-5 |
| CGA/DISS/JIS/BS341/DIN477 |
350/632/W22-14L/NO.3/NO.1 |
| Shipped as |
Compressed Gas |
|
| Technical Information |
| Cylinder State @ 21.1°C |
Gas |
| Flammable Limits In Air |
1.37-97% |
| Auto Ignition Temperature (°C ) |
-50 |
| Molecular Weight (g/mol) |
32.117 |
| Specific gravity (air =1) |
1.11 |
| Critical Temperature ( °C ) |
3.45 |
| Critical Pressure ( psig ) |
687.8 |
|
| Applications |
| Mainly used for semiconductors , TFT-LCD, Solar cells , Energy-saving Green Glass and applications in vapor deposition thin film precess . |
