| Product Name: Halocarbon 14 – Tetrafluoromethane CF4 |
| Packing: 40L, 44L, 47L, 50L cylinder (GB, ISO, DOT) |
| Filling Content: 30kg/cyl |
| Items |
Specifications |
| CF4 |
99.9% |
99.999% |
| O2 |
≤100 ppmv |
≤1.0 ppmv |
| N2 |
≤400 ppmv |
≤4.0 ppmv |
| CO2 |
≤80 ppmv |
≤0.5 ppmv |
| CO |
≤50 ppmv |
≤0.5 ppmv |
| CH4 |
≤50 ppmv |
≤0.5 ppmv |
| Other Halocarbons |
≤100 ppmv |
≤2.0 ppmv |
| H2O |
≤10 ppmv |
≤2.0 ppmv |
| SF6 |
≤15 ppmv |
≤1.0 ppmv |
| Acidity as HF |
≤1.0ppmv |
≤0.1ppmv |
|
| Transportation |
| DOT Shipping Name |
Tetrafluoromethane, Compressed |
| DOT Classification |
2.2 |
| DOT Label |
Nonflammable Gas |
| UN Number |
UN1982 |
| CAS No. |
75-73-0 |
| CGA/DISS/JIS |
320/716/W22-14L |
| Shipped as |
Compressed Gas |
|
| Technical Information |
| Cylinder State @ 21.1°C |
Gas |
| Flammable Limits In Air |
non-flammable |
| Auto Ignition Temperature (°C ) |
– |
| Molecular Weight (g/mol) |
88.01 |
| Specific gravity (air =1) |
3.04 |
| Critical Temperature ( °C ) |
-45.65 |
| Critical Pressure ( psig ) |
528.459 |
|
| Applications |
| One of the largest comsuption kinds of plasma etching gases in microelectronics industry , also widely used in surface cleaning of electronic device , manufacture of solar cell, laser technology , gas phase insulation , subzero refrigeration , leakage inspection agent and decontaminant of manufacture of printed circuit. |
